[BNC-all] UPW Update for the User Community

[Reger, Ronald K]

Dear Birck Users,

We are providing an update on the Ultra-Pure Water upgrade project.  Good progress has been made.....the new 'skids' are set in place and plumbed, the power and control wiring is installed, and the system is tentatively scheduled to begin the cleansing flush process on Friday, May 23.  This process requires the system to run continuously to flush out any contaminants and residue that may have been introduced during the manufacturing and/or assembly process.  We anticipate it will take about four days for the system to self-clean over the long Memorial Day holiday weekend, and the purity will be tested on Tuesday, May 27th when we come back.  If the purity is up to our ultra-pure standard then by ~3 PM on 5/27 UPW will again be available for use in the cleanroom and in the labs, and cleanroom tools will be available again.  In the meantime over the weekend only metrology tools can be used in the cleanroom and no fume hoods in the cleanroom will be available. If there is an issue with purity on Tuesday 5/27 an email will be sent out with the situation and anticipated time until availability.  Here is the Spring shutdown schedule updated slightly to show our anticipation to come back online next Tuesday:

[cid:image001.png at 01DBCB16.078D4760]

Note, some issues with our newly installed fume hoods have been observed and we're working with the construction and design companies to find a solution. Because of this, regardless of the UPW situation, all new fume hoods in the cleanroom remain closed and unavailable until a resolution can be implemented.  In the meantime, and after the UPW is back online, acid hoods in H-Bay will be available, and the photoresist solvent hoods in H, M & N-Bays will be available.

Thank you again for your patience as we performed this extensive upgrade of our UPW system.


Birck Engineering and Facilities
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