[BNC-all] Some Etchers & PVD-1 Going Down Early for Shut Down

[Manfred, Francis R]

The following tools will be shutting down two days earlier than the other cleanroom tools for the Spring Maintenance shut down, starting the morning of Thursday April 25.    This is necessary due to activities associated with the cleanroom modernization project:

Tergeo Plasma Cleaner
March Jupiter 2
Plasma-Therm Etcher
Panasonic Etcher
PVD - 1


Kind regards,


Francis



Francis R. Manfred
Sr Etch Research Engineer
Purdue University
Birck Nanotechnology Center | Room 2287C | Purdue University
Office:  765.494.6522 | Email: fmanfred at purdue.edu<mailto:fmanfred at purdue.edu>
Wiki: https://wiki.itap.purdue.edu/display/BNCWiki
iLab: https://purdue.ilabsolutions.com<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fpurdue.ilabsolutions.com%2F&data=05%7C02%7Cbnc-all%40ecn.purdue.edu%7Ca7324fbfa9a54a62f48108dc62d010aa%7C4130bd397c53419cb1e58758d6d63f21%7C0%7C0%7C638493892964102426%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C0%7C%7C%7C&sdata=jtSleAz1b%2Ba45pINiBqPp8OEV9Kj2LJHOx%2BlmtUoYB8%3D&reserved=0>



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