[BNC-all] New Jipelec RTA open for use
Hosler, Daniel A
dhosler at purdue.edu
Mon Mar 5 09:13:16 EST 2012
I am happy to announce the new Rapid Thermal Annealer (RTA) is open for training.
This new RTA resides in R-Bay of the cleanroom, and has many improved capabilities over the old RTA systems. It has 4 process gases, atmospheric or vacuum capability, thermocouple or pyrometer temperature control, and also a maximum temperature of 1200°C (for a very short period of time).
Please e-mail me at dhosler at purdue.edu for training or for more information. If you would like training, I will send you the Standard Operating Procedure for review, and we will also discuss your process requirements.
Thank you,
Dan Hosler
496-3883
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