[Airco-list] vacuum levels in Airco
Coral discussion list for Airco
airco-list at ecn.purdue.edu
Fri Nov 16 14:38:46 EST 2012
ALL,
The Airco is usable but barely, The vacuum level only goes down to 1.5x 10-5 . you will need to hit the degas button for 1 minute prior to your deposition, and I would recommend a good Ti or Cr layer to help your levels . The cryo is fine , the problem is the amount of organics that have been in the system are reducing the vacuum levels .. Email me if you have any further questions. We are planning a rebuild in early 2013
Best
Kenny
Kenny Schwartz
Birck Nanotechnology Center
Purdue University
PH 765-496-1174
kfschwar at purdue.edu
More information about the Airco-list
mailing list