[Airco-list] Pt deposition

[Brian Iverson]

I have decided to switch to platinum for my metal processing on the Airco
and thought I would check with someone who feels very comfortable with their
Pt deposition recipe.  If you deposit Pt, would you mind sharing your
complete parameter set (or as complete as you can be).  I'd like to start
with something that will work well.
Best,
Brian

-- 
Brian D. Iverson
Post-Doctoral Research Associate
biverson at purdue.edu

Purdue University
Birck Nanotechnology Center
1205 W. State St.
West Lafayette, IN 47907-2057
(765) 496-8340
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