ECE 59500 - Microfabrication Fundamentals
Note:
This course is offered during the first five weeks of the semester.
Course Details
Lecture Hours: 3 Credits: 1
Counts as:
- EE Elective
- CMPE Special Content Selective
Normally Offered:
Each Spring
Campus/Online:
On-campus only
Requisites:
MA 26600 and [PHYS 27200 or PHYS 24100] and CHM 11500
Requisites by Topic:
Differential equations, introductory physics (mechanics, electricity and magnetism), introductory chemistry.
Catalog Description:
Introduction to principles of microfabrication, including lithography, deposition, etching and planarization. This course provides a framework for understanding processes used in manufacturing of semiconductor devices, integrated circuits, microphotonic and micro-electromechanical systems (MEMS) components.
Required Text(s):
- The Science and Engineering of Microelectronic Fabridation , 2nd Edition , Campbell, S.A. , Oxford University Press
Recommended Text(s):
- Fundamentals of Microfabrication , 2nd Edition , Madoum M. , CRC Press
- Micromachined Transducers Source Book , Kovacs, G. , McGraw-Hill, Inc.
- Modular Series on Solid State Devices, Volume V: Introduction to Microelectronic Fabridation , Jaeger, Richard C. , Addison-Wesley Publishing Co. , 1988
Lecture Outline:
| Week | Topic |
|---|---|
| 1 | Overview of Microfabrication, Process Flow, Lithography |
| 2 | Lithography, Physical Vapor Deposition, Metal Films/Contacts |
| 3 | Chemical Vapor Deposition, Etching, Oxidation, and planarization |
| 4 | Diffusion, Ion Implantation, MEMS processing overview |
| 5 | Manufacturing and Yield (2 lectures during term will be exam periods) |
Assessment Method:
This course is graded on homework, reports and exams.