ECE 59500 - RF MEMS for Intelligent Communication SystemsLecture Hours: 3 Credits: 3 Professional Attributes
Experimental Course Offered: Spring 2011, Spring 2013
Requisites by Topic:
Undergraduate knowledge of electromagnetics
This course focuses on the modeling, design, technology and applications of RF Micro-Electro-Mechanical Systems (MEMS). Students will develop a strong understanding of RF MEMS technology and its applications on the future generation of communication systems, radars and sensors. The class begins by introducing linear and non-linear electromechanical models for RF MEMS devices through analytical and numerical techniques. The high potential of RF MEMS on building a variety of reconfigurable high-frequency components and systems is subsequently presented in detail. Finally, several research topics including reliability, packaging and novel architectures are introduced.
- RF MEMS - Theory, Design and Technology, 1st Edition, Gabriel M. Rebeiz, John wiley & Sons, 2003, ISBN No. 0471201693.
- Microsensors MEMS and Smart Devices, 1st Edition, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, John Wiley & Sons, 2001, ISBN No. 047186109X.
- Microsystem Design, 1st Edition, Stephen D. Senturia, Kluwer Academic Publishers, 2000, ISBN No. 0792372468.
- RF MEMS & Their Applications, 1st Edition, Vijay K. Varadan, K.J. Vinoy, K.A. Jose, John Wiley & Sons, 2003, ISBN No. 047084308X.
- Schaum's Outline of Strength of Materials, 4th Edition, William A. Nash, McGraw-Hill, 1998, ISBN No. 0070466173.
Learning Objectives:A student who successfully fulfills the course requirements will have demonstrated:
- An understanding of simple linear and non-linear mechanical, electromagnetic and electromechanical models of RF MEMS structures.. [None]
- An ability to design practical RF MEMS devices using analytical and numerical techniques.. [None]
- An ability to design high-performance circuits and sub-systems using RF MEMS components.. [None]
- An understanding of the limitations of the RF MEMS technology for wireless applications.. [None]
|1/2||Introduction to RF MEMS RF MEMS vs. solid state components Application areas and case studies RF MEMS development around the world|
|1||Review of basic mechanics and elements of strength of materials Stress and strain Stresses of beams Deflection of beams and spring constants|
|2||Mechanical modeling of MEMS switches Static analysis Dynamic analysis|
|2 1/2||Review of Electromagnetic analysis and modeling Transmission lines & high-frequency effects Scattering parameters Review of numerical techniques|
|1||Electromagnetic modeling of RF MEMS switches distributed models lumped-element models|
|1||Review of MEMS fabrication Bulk micromachining surface micromachining|
|1/2||Case studies of RF MEMS switches|
|1/2||RF MEMS inductors|
|1||RF MEMS varactors|
|1/2||Switching networks series and shunt configurations capacitive vs. ohmic contact absorptive switches|
|1||RF MEMS Phase shifters|
|1||RF MEMS filters|
|1/2||RF MEMS antennas|
|1||Research issues Reliability Packaging Novel system architectures|
|1||Project presentations and discussion|
Engineering Design Content:
Engineering Design Consideration(s):