ECE 59500 - RF MEMS for Intelligent Communication Systems

Lecture Hours: 3 Credits: 3

Professional Attributes
EE Elective

Experimental Course Offered: Spring 2011, Spring 2013

ECE 31100

Requisites by Topic:
Undergraduate knowledge of electromagnetics

Catalog Description:
This course focuses on the modeling, design, technology and applications of RF Micro-Electro-Mechanical Systems (MEMS). Students will develop a strong understanding of RF MEMS technology and its applications on the future generation of communication systems, radars and sensors. The class begins by introducing linear and non-linear electromechanical models for RF MEMS devices through analytical and numerical techniques. The high potential of RF MEMS on building a variety of reconfigurable high-frequency components and systems is subsequently presented in detail. Finally, several research topics including reliability, packaging and novel architectures are introduced.

Required Text(s):
  1. RF MEMS - Theory, Design and Technology, 1st Edition, Gabriel M. Rebeiz, John wiley & Sons, 2003, ISBN No. 0471201693.
Recommended Text(s):
  1. Microsensors MEMS and Smart Devices, 1st Edition, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, John Wiley & Sons, 2001, ISBN No. 047186109X.
  2. Microsystem Design, 1st Edition, Stephen D. Senturia, Kluwer Academic Publishers, 2000, ISBN No. 0792372468.
  3. RF MEMS & Their Applications, 1st Edition, Vijay K. Varadan, K.J. Vinoy, K.A. Jose, John Wiley & Sons, 2003, ISBN No. 047084308X.
  4. Schaum's Outline of Strength of Materials, 4th Edition, William A. Nash, McGraw-Hill, 1998, ISBN No. 0070466173.

Learning Objectives:

A student who successfully fulfills the course requirements will have demonstrated:
  1. An understanding of simple linear and non-linear mechanical, electromagnetic and electromechanical models of RF MEMS structures.. [None]
  2. An ability to design practical RF MEMS devices using analytical and numerical techniques.. [None]
  3. An ability to design high-performance circuits and sub-systems using RF MEMS components.. [None]
  4. An understanding of the limitations of the RF MEMS technology for wireless applications.. [None]
Assessment Method for Learning Objectives: There will be a mid-term exam (35%), a term project (35%) and homework assignments or quizzes (bi-weekly) (30%).

Lecture Outline:

Week(s) Major Topics
1/2 Introduction to RF MEMS RF MEMS vs. solid state components Application areas and case studies RF MEMS development around the world
1 Review of basic mechanics and elements of strength of materials Stress and strain Stresses of beams Deflection of beams and spring constants
2 Mechanical modeling of MEMS switches Static analysis Dynamic analysis
2 1/2 Review of Electromagnetic analysis and modeling Transmission lines & high-frequency effects Scattering parameters Review of numerical techniques
1 Electromagnetic modeling of RF MEMS switches distributed models lumped-element models
1 Review of MEMS fabrication Bulk micromachnining surface micromachining
1/2 Case studies of RF MEMS switches
1/2 RF MEMS inductors
1 RF MEMS varactors
1/2 Switching networks series and shunt configurations capacitive vs. ohmic contact absorptive switches
1 RF MEMS Phase shifters
1 RF MEMS filters
1/2 RF MEMS antennas
1 Research issues Reliability Packaging Novel system architectures
1 Project presentations and discussion

Engineering Design Content:

Establishment of Objectives and Criteria

Engineering Design Consideration(s):