ECE 59500 - RF MEMS for Intelligent Communication Systems
Course Details
Lecture Hours: 3 Credits: 3
Counts as:
- EE Elective
- CMPE Selective - Special Content
Experimental Course Offered:
Spring 2011, Spring 2013
Requisites:
ECE 31100
Requisites by Topic:
Undergraduate knowledge of electromagnetics
Catalog Description:
This course focuses on the modeling, design, technology and applications of RF Micro-Electro-Mechanical Systems (MEMS). Students will develop a strong understanding of RF MEMS technology and its applications on the future generation of communication systems, radars and sensors. The class begins by introducing linear and non-linear electromechanical models for RF MEMS devices through analytical and numerical techniques. The high potential of RF MEMS on building a variety of reconfigurable high-frequency components and systems is subsequently presented in detail. Finally, several research topics including reliability, packaging and novel architectures are introduced.
Required Text(s):
- RF MEMS - Theory, Design and Technology , 1st Edition , Gabriel M. Rebeiz , John wiley & Sons , 2003 , ISBN No. 0471201693
Recommended Text(s):
- Microsensors MEMS and Smart Devices , 1st Edition , Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim , John Wiley & Sons , 2001 , ISBN No. 047186109X
- Microsystem Design , 1st Edition , Stephen D. Senturia , Kluwer Academic Publishers , 2000 , ISBN No. 0792372468
- RF MEMS & Their Applications , 1st Edition , Vijay K. Varadan, K.J. Vinoy, K.A. Jose , John Wiley & Sons , 2003 , ISBN No. 047084308X
- Schaum's Outline of Strength of Materials , 4th Edition , William A. Nash , McGraw-Hill , 1998 , ISBN No. 0070466173
Learning Outcomes:
- An understanding of simple linear and non-linear mechanical, electromagnetic and electromechanical models of RF MEMS structures.. [None]
- An ability to design practical RF MEMS devices using analytical and numerical techniques.. [None]
- An ability to design high-performance circuits and sub-systems using RF MEMS components.. [None]
- An understanding of the limitations of the RF MEMS technology for wireless applications.. [None]
Lecture Outline:
Week(s) | Major Topics |
---|---|
1/2 | Introduction to RF MEMS RF MEMS vs. solid state components Application areas and case studies RF MEMS development around the world |
1 | Review of basic mechanics and elements of strength of materials Stress and strain Stresses of beams Deflection of beams and spring constants |
2 | Mechanical modeling of MEMS switches Static analysis Dynamic analysis |
2 1/2 | Review of Electromagnetic analysis and modeling Transmission lines & high-frequency effects Scattering parameters Review of numerical techniques |
1 | Electromagnetic modeling of RF MEMS switches distributed models lumped-element models |
1 | Review of MEMS fabrication Bulk micromachining surface micromachining |
1/2 | Case studies of RF MEMS switches |
1/2 | RF MEMS inductors |
1 | RF MEMS varactors |
1/2 | Switching networks series and shunt configurations capacitive vs. ohmic contact absorptive switches |
1 | RF MEMS Phase shifters |
1 | RF MEMS filters |
1/2 | RF MEMS antennas |
1 | Research issues Reliability Packaging Novel system architectures |
1 | Project presentations and discussion |
Engineering Design Content:
- Establishment of Objectives and Criteria
- Synthesis
- Analysis
Engineering Design Consideration(s):
- Economic
- Manufacturability
Assessment Method:
There will be a mid-term exam (35%), a term project (35%) and homework assignments or quizzes (bi-weekly) (30%).