ECE 52600 - Fundamental of BioMEMS and Micro-Integrated Systems

Course Details

Lecture Hours: 3 Credits: 3

Counts as:

  • EE Elective
  • CMPE Special Content Elective

Normally Offered:

Each Spring


On-campus and online

Catalog Description:

Key topics in biomedical micro-electro-mechanical systems (Bio-MEMS) and micro-integrated systems are covered. Biological concepts related to the BioMEMS are reviewed. Silicon process modules and soft-lithography processes used in the design and fabrication of BioMEMS and micro-integrated systems are presented. Applications of these systems in a variety of sensors and transducers are described. Recent advances in BioMEMS, Lab-on-a-Chip, and related advanced topics are discussed.

Required Text(s):

  1. Micromachined Transducers Sourcebook , G. Kovacs , McGraw Hill , 1998 , ISBN No. 0-07-290722-3

Recommended Text(s):

  1. Introduction to Microelectronic Fabrication, Volume V in the Modular Series on Solid State Devices , R. C. Jaeger , Prentice-Hall , 2002
  2. Microsensors , R.S. Muller, R.T. Howe, S.D. Senturia, R.L. Smith and R.M. White , IEEE Press , 1991
  3. Microsystem Design , S. Senturia , Kluwer Academic Press , 2000
  4. Silicon Micromachining , Elwenspoek and Jensen , Cambridge University Press , 1999
  5. The Science and Engineering of Microelectronic Fabrication , S.A. Campbell , Oxford University Press , 1996

Learning Outcomes:

A student who successfully fulfills the course requirements will have demonstrated:
  1. an ability to apply interdisciplinary principles from chemistry and biology, materials and mechanics, and micro-nano-fabrication to Bio-MEMS. [1,4]
  2. a basic knowledge of BioMEMS processing steps and processing modules. [4]
  3. an understanding of basic design and operation of BioMEMS sensors and transducers, and Biochips. [2]

Lecture Outline:

Lectures Major Topics
2 Introduction to MEMS/BioMEMS/BioSensors
5 Device Fabrication (Silicon Processing Including Lithography, Etching, Deposition, Bonding; Soft Lithography and Other Topics)
3 Biology/Chemistry Fundamentals (Cells, DNA, Proteins)
2 Microfluidics
6 BioMEMS and Detection Methods
2 Microarrays
5 Lab-on-a-chip Device
3 Presentations/Advanced Topics

Engineering Design Content:

  • Establishment of Objectives and Criteria
  • Synthesis
  • Analysis
  • Construction
  • Testing

Engineering Design Consideration(s):

  • Manufacturability

Assessment Method:

The course outcomes will be assessed by homework assignments, a project report, and exams.