ECE 69500 - MEMS Fabrication Materials and Structures
Note:
This course will run the last 5 weeks of the semester. It is available through PEO, and online for WL students only. Students will have access to the instructor through a discussion forum and by office hours. If there is sufficient enrollment, weekly help sessions will be scheduled.
Course Details
Lecture Hours: 1 Credits: 1
Counts as:
Experimental Course Offered:
Fall 2018
Requisites by Topic:
Undergraduate degree in engineering or the physical sciences
Catalog Description:
This course is designed for ECE students whose interests are in the design and fabrication of solid-state transducers using micromachining and MEMS technologies. In this course, we will introduce basic MEMS and micromachining fabrications technologies. This includes bulk micromachining, surface micromachining, and wafer bonding. Fabrication methods for integration of MEMS sensors with CMOS electronics, with special emphasis on post-CMOS processing, will also be covered. Mechanical and thermal properties of materials as related to their application sin common MEMS transducers will be presented. Finally, we will discuss mechanical structures (beams, plates, and membranes) used in the design of MEMS sensors and actuators. Throughout the course, examples of MEMS transducers used in consumer electronics, automotive industry, and biomedical instrumentation will be highlighted.
Required Text(s):
- Foundations of MEMS , 2nd Edition , Chang Liu , Pearson Education , 2011
Recommended Text(s):
- Introduction to BioMEMS , Albert Folch , CRC Press , 2016
- Micromachined Transducer Sourcebook , Gregory Kovacs , McGraw Hill , 1998
- Silicon Micromachining , M. Elwenspoek and H. V. Jansen , Cambridge University Press , 1999
Lecture Outline:
| Hours | Topics |
|---|---|
| 1 | Course introduction |
| 3 | Silicon bulk micromachining |
| 2 | Silicon surface micromachining |
| 1.5 | Wafer bonding |
| 2.5 | Mechanical properties of MEMS materials |
| 1.5 | Thermal properties of MEMS materials |
| 2 | MEMS microstructures |
| 1 | Selected micromachined transducers |
| .5 | Course summary |