ECE 69500 - Principles and Methods of Nanofabrication
Note:
Assignments, Expectations and Grading: Midterms (two): 20% each Problems-of-the-week: 10% (+ bonus points) Key Paper Search (individual): 20% Nanofabrication Challenge Proposals (group): 30%
Course Details
Lecture Hours: 3 Credits: 3
Areas of Specialization:
- Microelectronics and Nanotechnology
Counts as:
Experimental Course Offered:
Fall 2011, Fall 2013, Spring 2016
Requisites:
Graduate standing in engineering or science
Catalog Description:
Top-down and bottom-up approaches to the fabrication of nanoscale (<100 nm) features, materials, and devices; limits of optical and electron beam lithography; imprinting techniques; probe-based assembly; synthesis of nanostructures by solution methods, metal-catalyzed reactions, heteroepitaxy, phase separation; control of nucleation, coalescence and growth rate; directed self-organization of nanoscale features (pores, islands, clusters, tubes and wires); ion-beam and pulsed-laser processing at the nanoscale; stability of nanostructures
Required Text(s):
None.
Recommended Text(s):
None.
Lecture Outline:
Week | Major Topics |
---|---|
1 | Overview of nanotechnology; Discussion - future of nanotechnology; Societal impact; Limits of optical lithography |
2 | Limits of optical lithography; X-ray interactions with matter; X-ray sources; X-ray lithography |
3 | Proximity and EUV projection lithography; Electron and ion projection lithography |
4 | Electron beam lithography; Focused ion beam lithography |
5 | Overview of soft lithography; Microcontact printing; Micromolding; Nanoimprint lithography |
6 | Review of quantum confinement in 2D heterostructures; Heteroepitaxy, lattice mismatch and critical thickness |
7 | Midterm I; Quantum wires; Epitaxial growth on vicinal substrates; Growth on nonplanar patterned substrates |
8 | Quantum dots by heteroepitaxy; Vapor-liquid-solid growth of nanowires |
9 | Catalytic synthesis of carbon nanotubes. |
10 | Block copolymers for nanofabrication; Surface nanofabrication with soft materials; self-assembled monolayers. |
11 | Self-assembled templates for nanofabrication: porous anodic alumina, ion-track polycarbonate membranes, micelle templates, zeolites and MCM-41 |
12 | Electrodeposition into porous templates; Review of nucleation theory under the assumptions of capillarity; Nucleation rate; Ostwald ripening |
13 | Gas-phase synthesis of nanoparticles; Colloidal synthesis of nanoparticles. |
14 | Midterm II; Sorting and assembly of nanoparticles and nanowires: fluidic self-assembly |
15 | Electrophoresis, dielectrophoresis and other methods of directed assembly |